"Electrothermally-Actuated Micromirrors with Bimorph Actuators - ..."

Cheng-hua Tsai et al. (2015)

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DOI: 10.3390/S150614745

access: open

type: Journal Article

metadata version: 2023-01-04

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Cheng-hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, Shih-Hsiang Liu, Jui-Che Tsai:
Electrothermally-Actuated Micromirrors with Bimorph Actuators - Bending-Type and Torsion-Type. Sensors 15(6): 14745-14756 (2015)

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