"Process Variability in Top-Down Fabrication of Silicon Nanowire-Based ..."

Marcel Tintelott et al. (2021)

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DOI: 10.3390/S21155153

access: open

type: Journal Article

metadata version: 2021-08-13

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Marcel Tintelott, Vivek Pachauri, Sven Ingebrandt, Xuan Thang Vu:
Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays. Sensors 21(15): 5153 (2021)

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