"Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive ..."

Baohua Tian et al. (2021)

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DOI: 10.3390/S21020379

access: open

type: Journal Article

metadata version: 2021-02-11

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Baohua Tian, Haiping Shang, Lihuan Zhao, Dahai Wang, Yang Liu, Weibing Wang:
Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor. Sensors 21(2): 379 (2021)

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