"A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology ..."

Qiulin Tan et al. (2013)

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DOI: 10.3390/S130809896

access: open

type: Journal Article

metadata version: 2023-06-26

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Qiulin Tan, Hao Kang, Jijun Xiong, Li Qin, Wendong Zhang, Chen Li, Liqiong Ding, Xiansheng Zhang, Mingliang Yang:
A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments. Sensors 13(8): 9896-9908 (2013)

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