"An Integrated Gold-Film Temperature Sensor for In Situ Temperature ..."

Xiaoxiao Song et al. (2020)

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DOI: 10.3390/S20133652

access: open

type: Journal Article

metadata version: 2022-04-09

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  - https://dblp.org/rec/journals/sensors/SongLFZQWT20
Xiaoxiao Song, Huafeng Liu, Yanyan Fang, Chun Zhao, Ziqiang Qu, Qiu Wang, Liang Cheng Tu:
An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. Sensors 20(13): 3652 (2020)

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