"Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory ..."

Maria Assunta Signore et al. (2024)

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DOI: 10.3390/S24072071

access: open

type: Journal Article

metadata version: 2024-05-17

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Maria Assunta Signore, Gabriele Rescio, Luca Francioso, Flavio Casino, Alessandro Leone:
Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection. Sensors 24(7): 2071 (2024)

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