"Enhancing the Responsiveness of Thermoelectric Gas Sensors with ..."

Woosuck Shin et al. (2024)

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DOI: 10.3390/S24103058

access: open

type: Journal Article

metadata version: 2024-06-18

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Woosuck Shin, Maiko Nishibori, Toshio Itoh, Noriya Izu, Ichiro Matsubara:
Enhancing the Responsiveness of Thermoelectric Gas Sensors with Boron-Doped and Thermally Annealed SiGe Thin Films via Low-Pressure Chemical Vapor Deposition. Sensors 24(10): 3058 (2024)

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