"A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and ..."

Xiaoqing Shi et al. (2018)

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DOI: 10.3390/S18082494

access: open

type: Journal Article

metadata version: 2023-10-23

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Xiaoqing Shi, Yulan Lu, Bo Xie, Yadong Li, Junbo Wang, Deyong Chen, Jian Chen:
A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. Sensors 18(8): 2494 (2018)

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