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"Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the ..."
Sergey Yu. Shevchenko, Denis A. Mikhailenko, Oleg Markelov (2020)
- Sergey Yu. Shevchenko
, Denis A. Mikhailenko
, Oleg Markelov
:
Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects. Sensors 20(2): 464 (2020)

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