"In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for ..."

Andi Setiono et al. (2020)

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DOI: 10.3390/S20030618

access: open

type: Journal Article

metadata version: 2024-07-04

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Andi Setiono, Maik Bertke, Wilson Ombati Nyang'au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner:
In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection. Sensors 20(3): 618 (2020)

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