"A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based ..."

Víctor Ruiz-Díez et al. (2019)

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DOI: 10.3390/S19030658

access: open

type: Journal Article

metadata version: 2024-10-25

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Víctor Ruiz-Díez, Javier Toledo, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas:
A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors. Sensors 19(3): 658 (2019)

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