"EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, ..."

Ombeline de La Rochefoucauld et al. (2021)

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DOI: 10.3390/S21030874

access: open

type: Journal Article

metadata version: 2021-03-02

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Ombeline de La Rochefoucauld, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang, Xavier Levecq, Martin Piponnier, Philippe Zeitoun:
EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors 21(3): 874 (2021)

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