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"A Micromachined Pressure Sensor with Integrated Resonator Operating at ..."
Sen Ren et al. (2013)
- Sen Ren, Weizheng Yuan, Dayong Qiao, Jinjun Deng, Xiaodong Sun:
A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure. Sensors 13(12): 17006-17024 (2013)
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