"Design and Characterization of a Fully Differential MEMS Accelerometer ..."

Peng Qu, Hongwei Qu (2013)

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DOI: 10.3390/S130505720

access: open

type: Journal Article

metadata version: 2018-11-14

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Peng Qu, Hongwei Qu:
Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology. Sensors 13(5): 5720-5736 (2013)

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