"Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with ..."

Néstor N. Peña-García et al. (2018)

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DOI: 10.3390/S18103545

access: open

type: Journal Article

metadata version: 2020-05-30

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  - https://dblp.org/rec/journals/sensors/Pena-GarciaAGRH18
Néstor N. Peña-García, Luz Antonio Aguilera-Cortés, Max A. González-Palacios, Jean-Pierre Raskin, Agustín Leobardo Herrera-May:
Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications. Sensors 18(10): 3545 (2018)

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