"Contribution of Ribbon-Structured SiO2 Films to AlN-Based and ..."

Mohammed Moutaouekkil et al. (2023)

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DOI: 10.3390/S23146284

access: open

type: Journal Article

metadata version: 2023-08-18

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Mohammed Moutaouekkil, Jérémy Streque, Othmane Marbouh, El Houssaine El Boudouti, Omar Elmazria, Philippe Pernod, Olivier Bou Matar, Abdelkrim Talbi:
Contribution of Ribbon-Structured SiO2 Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators. Sensors 23(14): 6284 (2023)

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