"Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners."

Laurent Mollard et al. (2023)

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DOI: 10.3390/S23239538

access: open

type: Journal Article

metadata version: 2024-02-29

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Laurent Mollard, Christel Dieppedale, Antoine Hamelin, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan:
Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners. Sensors 23(23): 9538 (2023)

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