"A 4 mm2 Double Differential Torsional MEMS Accelerometer Based ..."

Tongqiao Miao et al. (2017)

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DOI: 10.3390/S17102264

access: open

type: Journal Article

metadata version: 2018-11-14

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Tongqiao Miao, Dingbang Xiao, Qingsong Li, Zhanqiang Hou, Xuezhong Wu:
A 4 mm² Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration. Sensors 17(10): 2264 (2017)

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