"Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a ..."

Xiaodan Miao et al. (2016)

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DOI: 10.3390/S16050634

access: open

type: Journal Article

metadata version: 2018-11-14

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Xiaodan Miao, Xuhan Dai, Yi Huang, Guifu Ding, Xiao-Lin Zhao:
Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer. Sensors 16(5): 634 (2016)

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