"Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction."

Eloi Marigó et al. (2015)

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DOI: 10.3390/S150717036

access: open

type: Journal Article

metadata version: 2018-11-14

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Eloi Marigó, Marc Sansa, Francesc Pérez-Murano, Arantxa Uranga, Núria Barniol:
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction. Sensors 15(7): 17036-17047 (2015)

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