"Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach."

Stefano Mariani et al. (2009)

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DOI: 10.3390/S90100556

access: open

type: Journal Article

metadata version: 2019-10-19

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Stefano Mariani, Aldo Ghisi, Alberto Corigliano, Sarah Zerbini:
Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach. Sensors 9(1): 556-567 (2009)

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