"A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated ..."

Rong-Hua Ma et al. (2009)

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DOI: 10.3390/S90705460

access: open

type: Journal Article

metadata version: 2020-10-26

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Rong-Hua Ma, Dung-An Wang, Tzu-Han Hsueh, Chia-Yen Lee:
A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme. Sensors 9(7): 5460-5476 (2009)

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