"An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of ..."

Zhi-Feng Lou et al. (2019)

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DOI: 10.3390/S19132855

access: open

type: Journal Article

metadata version: 2023-06-26

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Zhi-Feng Lou, Xiu-Peng Hao, Yin-Di Cai, Tien-Fu Lu, Xiao-Dong Wang, Kuang-Chao Fan:
An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages. Sensors 19(13): 2855 (2019)

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