"Micromachined Fluid Inertial Sensors."

Shi Qiang Liu, Rong Zhu (2017)

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DOI: 10.3390/S17020367

access: open

type: Journal Article

metadata version: 2018-11-14

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Shi Qiang Liu, Rong Zhu:
Micromachined Fluid Inertial Sensors. Sensors 17(2): 367 (2017)

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