"A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the ..."

Huan Liu et al. (2013)

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DOI: 10.3390/S131013178

access: open

type: Journal Article

metadata version: 2020-02-19

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Huan Liu, Shuming Yang, Yulong Zhao, Zhuangde Jiang, Yan Liu, Bian Tian:
A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings. Sensors 13(10): 13178-13191 (2013)

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