"Design and Fabrication of Piezoelectric Micromachined Ultrasound ..."

Junhong Li et al. (2017)

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DOI: 10.3390/S17061381

access: open

type: Journal Article

metadata version: 2024-10-06

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Junhong Li, Wei Ren, Guoxiang Fan, Chenghao Wang:
Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film. Sensors 17(6): 1381 (2017)

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