"Artificial-Neural-Network-Driven Innovations in Time-Varying Process ..."

Seunghwan Lee et al. (2023)

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DOI: 10.3390/S23198226

access: open

type: Journal Article

metadata version: 2024-02-10

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Seunghwan Lee, Yonggyun Park, Pengzhan Liu, Muyoung Kim, Hyeong-U. Kim, Taesung Kim:
Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition. Sensors 23(19): 8226 (2023)

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