"High-Efficiency Output Pressure Performance Using Capacitive Micromachined ..."

Byung-chul Lee et al. (2018)

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DOI: 10.3390/S18082520

access: open

type: Journal Article

metadata version: 2018-11-14

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  - https://dblp.org/rec/journals/sensors/LeeNPK18
Byung-chul Lee, Amin Nikoozadeh, Kwan Kyu Park, Butrus T. Khuri-Yakub:
High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs. Sensors 18(8): 2520 (2018)

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