"Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and ..."

Jaewoo Lee et al. (2019)

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DOI: 10.3390/S19030488

access: open

type: Journal Article

metadata version: 2021-04-09

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Jaewoo Lee, Jong-Pil Im, Jeong-Hun Kim, Sol-Yee Lim, Seung-Eon Moon:
Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor. Sensors 19(3): 488 (2019)

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