"Short-Range Six-Axis Interferometer Controlled Positioning for Scanning ..."

Josef Lazar et al. (2014)

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DOI: 10.3390/S140100877

access: open

type: Journal Article

metadata version: 2024-10-06

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Josef Lazar, Petr Klapetek, Miroslav Valtr, Jan Hrabina, Zdenek Buchta, Ondrej Cíp, Martin Cízek, Jindrich Oulehla, Mojmir Sery:
Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy. Sensors 14(1): 877-886 (2014)

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