"Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using ..."

Yuichi Kurashima et al. (2024)

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DOI: 10.3390/S24124000

access: open

type: Journal Article

metadata version: 2024-07-19

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Yuichi Kurashima, Atsuhiko Maeda, Naoto Oshima, Taisei Motomura, Takashi Matsumae, Mitsuhiro Watanabe, Hideki Takagi:
Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source. Sensors 24(12): 4000 (2024)

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