"Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused ..."

Piotr Kunicki et al. (2019)

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DOI: 10.3390/S19204429

access: open

type: Journal Article

metadata version: 2020-05-30

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Piotr Kunicki, Tihomir Angelov, Tzvetan Ivanov, Teodor P. Gotszalk, Ivo Rangelow:
Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing. Sensors 19(20): 4429 (2019)

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