"Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique."

Pin-Hsu Kao et al. (2009)

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DOI: 10.3390/S90806219

access: open

type: Journal Article

metadata version: 2022-10-02

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Pin-Hsu Kao, Ching-Liang Dai, Cheng-Chih Hsu, Chyan-Chyi Wu:
Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique. Sensors 9(8): 6219-6231 (2009)

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