"Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor ..."

Yuhong Kang et al. (2022)

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DOI: 10.3390/S22249737

access: open

type: Journal Article

metadata version: 2023-01-31

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Yuhong Kang, Scott Mouring, Albrey de Clerck, Shuo Mao, Wing Ng, Hang Ruan:
Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change. Sensors 22(24): 9737 (2022)

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