"Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer ..."

Sanjog Vilas Joshi, Sina Sadeghpour, Michael Kraft (2023)

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DOI: 10.3390/S23104826

access: open

type: Journal Article

metadata version: 2023-07-07

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Sanjog Vilas Joshi, Sina Sadeghpour, Michael Kraft:
Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array. Sensors 23(10): 4826 (2023)

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