"Structural Designing of a MEMS Capacitive Accelerometer for Low ..."

Jiangbo He et al. (2018)

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DOI: 10.3390/S18020643

access: open

type: Journal Article

metadata version: 2018-11-14

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Jiangbo He, Wu Zhou, Huijun Yu, Xiao-Ping He, Peng Peng:
Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity. Sensors 18(2): 643 (2018)

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