"Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling ..."

Michael Haub et al. (2021)

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DOI: 10.3390/S21113795

access: open

type: Journal Article

metadata version: 2022-01-10

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  - https://dblp.org/rec/journals/sensors/HaubBGZS21
Michael Haub, Martin Bogner, Thomas Günther, André Zimmermann, Hermann Sandmaier:
Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning. Sensors 21(11): 3795 (2021)

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