"In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study ..."

Faezeh Arab Hassani, Yoshishige Tsuchiya, Hiroshi Mizuta (2013)

> Home

Details and statistics

DOI: 10.3390/S130709364

access: open

type: Journal Article

metadata version: 2018-11-14

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/HassaniTM13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/HassaniTM13
Faezeh Arab Hassani, Yoshishige Tsuchiya, Hiroshi Mizuta:
In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges. Sensors 13(7): 9364-9387 (2013)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.