"Measurements of True Leak Rates of MEMS Packages."

Bongtae Han (2012)

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DOI: 10.3390/S120303082

access: open

type: Journal Article

metadata version: 2018-11-30

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Bongtae Han:
Measurements of True Leak Rates of MEMS Packages. Sensors 12(3): 3082-3104 (2012)

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