"MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal ..."

Muhannad Ghanam et al. (2023)

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DOI: 10.3390/S23094248

access: open

type: Journal Article

metadata version: 2023-07-07

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Muhannad Ghanam, Frank Goldschmidtboeing, Thomas Bilger, Andreas Bucherer, Peter Woias:
MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature. Sensors 23(9): 4248 (2023)

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