"Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz ..."

Guo-Hua Feng, Wen-Sheng Chen (2022)

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DOI: 10.3390/S22197471

access: open

type: Journal Article

metadata version: 2022-12-05

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Guo-Hua Feng, Wen-Sheng Chen:
Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity. Sensors 22(19): 7471 (2022)

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