"Optimization of AIN Composite Structure Based Surface Acoustic Wave Device ..."

Shuyao Fan et al. (2020)

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DOI: 10.3390/S20154160

access: open

type: Journal Article

metadata version: 2024-12-12

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Shuyao Fan, Wen Wang, Xueling Li, Yana Jia, Yuan Sun, Mengwei Liu:
Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature. Sensors 20(15): 4160 (2020)

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