"Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D ..."

Michael Fahrbach et al. (2023)

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DOI: 10.3390/S23042003

access: open

type: Journal Article

metadata version: 2023-04-16

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Michael Fahrbach, Min Xu, Wilson Ombati Nyang'au, Oleg Domanov, Christian H. Schwalb, Zhi Li, Christian Kuhlmann, Uwe Brand, Erwin Peiner:
Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. Sensors 23(4): 2003 (2023)

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