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"Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D ..."
Michael Fahrbach et al. (2023)
- Michael Fahrbach
, Min Xu
, Wilson Ombati Nyang'au
, Oleg Domanov
, Christian H. Schwalb
, Zhi Li
, Christian Kuhlmann, Uwe Brand
, Erwin Peiner
:
Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. Sensors 23(4): 2003 (2023)
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