"Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual ..."

Xiaohui Du et al. (2016)

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DOI: 10.3390/S16020158

access: open

type: Journal Article

metadata version: 2024-02-21

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  - https://dblp.org/rec/journals/sensors/DuLLZSW16
Xiaohui Du, Yifang Liu, Anlin Li, Zhou Zhou, Daoheng Sun, Lingyun Wang:
Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. Sensors 16(2): 158 (2016)

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