"Fabrication of Weak C-Axis Preferred AlN Thin Film for Temperature ..."

Ling Dong et al. (2021)

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DOI: 10.3390/S21165345

access: open

type: Journal Article

metadata version: 2021-08-30

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Ling Dong, Yang Li, Jingwen Lv, Hongchuan Jiang, Wanli Zhang:
Fabrication of Weak C-Axis Preferred AlN Thin Film for Temperature Measurement. Sensors 21(16): 5345 (2021)

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