"C-Axis Textured, 2-3 μm Thick Al0.75Sc0.25N Films Grown on Chemically ..."

Asaf Cohen et al. (2022)

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DOI: 10.3390/S22187041

access: open

type: Journal Article

metadata version: 2023-09-30

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  - https://dblp.org/rec/journals/sensors/CohenCCKFKKFWLE22
Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly I. Frenkel, Ellen Wachtel, Igor Lubomirsky, David Ehre:
C-Axis Textured, 2-3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications. Sensors 22(18): 7041 (2022)

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