"Review on the Modeling of Electrostatic MEMS."

Wan-Chun Chuang et al. (2010)

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DOI: 10.3390/S100606149

access: open

type: Journal Article

metadata version: 2023-09-30

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Wan-Chun Chuang, Hsin-Li Lee, Pei-Zen Chang, Yuh-Chung Hu:
Review on the Modeling of Electrostatic MEMS. Sensors 10(6): 6149-6171 (2010)

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