"CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties."

Wan-Chun Chuang, Yuh-Chung Hu, Pei-Zen Chang (2012)

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DOI: 10.3390/S121217094

access: open

type: Journal Article

metadata version: 2023-09-30

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Wan-Chun Chuang, Yuh-Chung Hu, Pei-Zen Chang:
CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties. Sensors 12(12): 17094-17111 (2012)

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