"Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor."

Myoung-Ock Cho, Woojin Jang, Si-Hyung Lim (2021)

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DOI: 10.3390/S21238153

access: open

type: Journal Article

metadata version: 2022-01-11

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Myoung-Ock Cho, Woojin Jang, Si-Hyung Lim:
Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor. Sensors 21(23): 8153 (2021)

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