"Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for ..."

Mao-Hsiung Chiang (2010)

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DOI: 10.3390/S100402675

access: open

type: Journal Article

metadata version: 2018-11-14

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Mao-Hsiung Chiang:
Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy. Sensors 10(4): 2675-2693 (2010)

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